发明名称 Chemically Amplified Photorestist Composition, Laminated Product, and Connection Element
摘要 There are provided a stable chemically amplified photoresist composition that undergoes no change in alkali solubility prior to irradiation, a photoresist laminated product produced by laminating the photoresist composition onto a support, and a manufacturing method for a photoresist pattern and a manufacturing method for a connection terminal that use the photoresist composition and the laminated product. A chemically amplified photoresist composition is provided comprising (a) a resin that undergoes a change in alkali solubility under the action of acid, (b) a compound that generates acid on irradiation, and (c) a corrosion inhibitor.
申请公布号 US2007275320(A1) 申请公布日期 2007.11.29
申请号 US20040547830 申请日期 2004.12.03
申请人 WASHIO YASUSHI;SAITO KOJI 发明人 WASHIO YASUSHI;SAITO KOJI
分类号 G03F1/00 主分类号 G03F1/00
代理机构 代理人
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