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发明名称
Slurry and method for forming Ruthenium bottom electrode using the same
摘要
申请公布号
KR100780604(B1)
申请公布日期
2007.11.29
申请号
KR20000086678
申请日期
2000.12.30
申请人
发明人
分类号
C09K3/14
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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