MASK FOR PLASMA CVD, AND METHOD OF CLEANING MASK FOR PLASMA CVD

摘要

PROBLEM TO BE SOLVED: To provide a mask for plasma CVD (chemical vapor deposition) where, in a state of maintaining the advantages of a metallic mask, the service life of the mask can be elongated even if a plasma CVD system is used for the cleaning of the mask. SOLUTION: The mask 11 for plasma CVD is provided with: a metallic mask body 12 whose profile is rectangularly formed; and a ceramic cover 13 arranged on the periphery of the metallic mask body 12. The cover 13 is made of aluminum. The mask 11 for plasma CVD is cleaned using a plasma CVD system where a cleaning gas is fed from the side direction of the mask 11 for plasma CVD arranged inside a chamber into the chamber. COPYRIGHT: (C)2008,JPO&INPIT