发明名称 MIM CAPACITOR
摘要 A method for forming a MIM-type capacitor by filling of trenches by conformal depositions of insulating materials and of conductive materials, two successive electrodes of the capacitor including on either side of a thin vertical insulating layer at least one conductive layer of same nature, including the step of lowering the level of the conductive layers with respect to the level of the insulating layer separating them.
申请公布号 US2007275536(A1) 申请公布日期 2007.11.29
申请号 US20070746177 申请日期 2007.05.09
申请人 STMICROELECTRONICS S.A. 发明人 CREMER SEBASTIEN;PERROT CEDRIC;RICHARD CLAIRE
分类号 H01L21/20 主分类号 H01L21/20
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