Reflection characteristic measuring apparatus

摘要

A reflection characteristic measuring apparatus includes: at least one illuminator for illuminating a sample surface to be measured with light; a plurality of light receiving sections each adapted for receiving the light reflected on the sample surface illuminated by the light from the illuminator to output two-dimensional light receiving data, respectively; and a deriving section for deriving a characteristic of the sample surface based on a weighted average obtained by applying a weighting factor to each of the light receiving data outputted from the light receiving sections based on an installation condition concerning the illuminator and the light receiving sections, and by averaging the light receiving data weighed with the weighting factors.