发明名称 Semiconductor Device Having Multi-Gate Structure and Method of Manufacturing the Same
摘要 Provided are a semiconductor device having a mesa-type active region including a plurality of slabs and a method of manufacturing the semiconductor device. The semiconductor device includes a first active region and a second active region. The first active region is formed in a line-and-space pattern on a substrate and includes the slabs, each slab having a first surface, a second surface facing a direction opposite to the first side, and a top surface. The first active region and the second active region are composed of identical or different materials. The second active region contacts at least one end of each of the slabs on the substrate to connect the slabs to one another The method includes forming a first active region in a line-and-space pattern on the substrate and forming the second active region.
申请公布号 US2007272925(A1) 申请公布日期 2007.11.29
申请号 US20050590101 申请日期 2005.02.05
申请人 CHOI JUNG-A;YANG JEONG-HAWAN;JIN YOU-SCUNG 发明人 CHOI JUNG-A;YANG JEONG-HAWAN;JIN YOU-SCUNG
分类号 H01L29/04;H01L29/78;H01L21/336;H01L27/12;H01L29/786 主分类号 H01L29/04
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