| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of detecting foreign matter stuck in the formation of a coating film, wherein the crack of the glass substrate or the damage of the tip of a slit nozzle due to the interference between the surface of the glass substrate and the tip of the slit nozzle which is caused by the foreign matters stuck on the surface of a stage or the rear surface of the glass substrate is prevented in the formation of the coating film on the glass substrate using the slit coater. SOLUTION: A glass substrate surface detecting sensor 51 and a stage face detecting sensor 61 are provided in the slit nozzle 31. The clearance L1 between the tip of the slit nozzle 31 and the surface of the glass substrate 21 is measured by the glass substrate surface detecting sensor 51 and the clearance L2 between the tip of the slit nozzle 31 and the stage 11 is measured by the stage face detecting sensor 61. The foreign matters stuck on the stage surface and the rear face of the glass substrate are identified by comparing the difference (L2-L1) of the clearance of L1 and L2 with the thickness of the charged glass substrate. COPYRIGHT: (C)2008,JPO&INPIT
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