| 摘要 |
PROBLEM TO BE SOLVED: To highly precisely measure a distance to an object for collimation without irradiating the object for collimation with a laser light beam of a laser interferometer. SOLUTION: The light wave range finder 32 and the laser length meter 28 mounted on the moving base 26 are moved from reference point A to measurement point B (reflection prism 36) together with the base 26 in an approaching or leaving direction about 10 cm (rounded to 10 cm) the distance D2 from this point to the reflection prism 36 is measured by the light wave range finder 32. The measurement value of the laser length meter 28 is set to zero, then the moving base 26 is returned about 10 cm toward the reference point A direction while irradiating the reflection prism 34 with the laser light beam from the laser length meter 28 and the moving amount D3 of this time is measured by the laser length meter 28. From both the measurement values D2 and D3, the distance L between the reference point A and the measurement B is operated: L=D2+D3 or D2-D3. The light path length of the laser length meter 28 is short and the capacity of the laser electric source is small. COPYRIGHT: (C)2008,JPO&INPIT
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