| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently remove a small amount of fluorine compounds contained in a gas to be treated. <P>SOLUTION: The small amount of fluorine compounds contained in the gas to be treated are concentrated with an adsorbent, separated when the adsorbing capacity of the adsorbent reaches its saturation, and treated in a fluorine compound treating apparatus installed in a rear stage. A detecting device for the fluorine compounds installed at the downstream of an adsorbing column monitors the concentration of the fluorine compounds passed through without being sufficiently adsorbed with the adsorbent, and heating of the fluorine compound treating apparatus and a gas heater heating the gas flowing in for separating the fluorine compounds starts after confirmation of the passing through of the unadsorbed fluorine compounds. Excessive running costs are saved by controlling a heating time. Further, since the gas heater is characterized by fast heating, the cycle of adsorption or separation is accelerated by fast separating the adsorbed fluorine compounds through fast heating and the amount of filling adsorbent is reduced, thereby making apparatus compact. <P>COPYRIGHT: (C)2008,JPO&INPIT |
