发明名称 Method for manufacturing a magnetic write head having a trailing shield with an accurately controlled trailing shield gap thickness
摘要 A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield. After forming a magnetic write pole such as by masking and ion milling a magnetic write pole layer, a thin layer of alumina is deposited. This is followed by the deposition of a thin layer of Rh. Then, a thick layer of alumina is deposited, having a thickness that is preferably at least equal to the height of the write pole layer. A chemical mechanical polish is then performed until a portion of the Rh layer over the top (trailing edge) of the write pole is exposed. A material removal process such as ion milling is then performed to remove the exposed Rh layer exposing the thin alumina layer there beneath. The exposed thin alumina layer over the trailing edge of the write pole can then either be removed or left intact to form a portion of a trailing shield gap layer. Another Rh layer can then be deposited to provide a non-magnetic trailing shield gap. A magnetic material is then deposited to form the trailing shield. Since the Rh trailing gap layer is electrically conductive it can also serve as a seed layer for electroplating the magnetic trailing shield.
申请公布号 US2007268625(A1) 申请公布日期 2007.11.22
申请号 US20060439297 申请日期 2006.05.22
申请人 HITACHI GLOBAL STORAGE TECHNOLOGIES 发明人 JIANG MING;PENTEK ARON;ZHENG YI
分类号 G11B5/147;G11B5/127 主分类号 G11B5/147
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