| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem that time-series information for each semiconductor manufacturing apparatus cannot be extracted and displayed when abnormality analysis is executed after an abnormality is detected in a conventional group management system. <P>SOLUTION: A server stores a plurality of items of measurement information, as time-series information about information measured with a plurality of semiconductor manufacturing apparatuses, and as information having an apparatus identifier for identifying semiconductor manufacturing apparatuses and time information indicating a time. In executing the abnormality analysis after abnormality detection, the server accepts an instruction of outputting a chart including the apparatus identifier, reads a plurality of items of measurement information having one or more apparatus identifiers included in the output instruction, constructs a chart of a mode with which the measurement information per apparatus identifier can be visually discriminated based on the read measurement information, and outputs the constructed chart. In this way, the time-series information for each semiconductor manufacturing apparatus can be extracted and displayed. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
