DIGITAL LIGHTING PROCESSOR AND MANUFACTURING METHOD THEREOF

摘要

A digital lighting processor and a manufacturing method of the same are provided to improve picture quality by removing interference and loss of light. A penetrating electrode(102) is formed as much as constant depth in a first semiconductor substrate(100). A DMD element structure is formed on the first semiconductor substrate and is electrically connected to the penetrating electrode. A plurality of MOS transistors are formed on a second semiconductor substrate(200). A metal line is formed on the second semiconductor substrate. The penetrating electrode is exposed by grinding a backside of the first semiconductor substrate facing a front surface of the first semiconductor substrate on which the DMD element structure is formed. The first semiconductor substrate is laminated on the second semiconductor substrate.