| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat treatment furnace, a planar display element device and a planar display element manufactured by it, treating in either of closed and open structures at an ordinary pressure, reducing the treatment time by instantaneous heating, achieving the improvement in yield and cost reduction, holding down damage due to thermal expansion and shrinkage of a substrate to the minimum by shorting the high-temperature treatment time to decrease proportion defective, and improving compactness of a structure forming material layer achieved on the substrate. <P>SOLUTION: This heat treatment furnace 402 for manufacturing the planar display element, heat-treats the structure forming material layer formed on a panel 404 for manufacturing a planar display element to form a required structure. The heat treatment furnace includes: a magnetron generating microwaves; a wave guide for transmitting microwaves generated in the magnetron; and a discharge tube adapted to form microwave plasma 306 by the microwave and gas and emit the same to be applied to the panel. <P>COPYRIGHT: (C)2008,JPO&INPIT |
