发明名称 |
Elektrostatische Spannvorrichtung und Verfahren zur Herstellung derselben |
摘要 |
Disclosed is an electrostatic chuck having a coating layer (3) surrounding an insulating layer (1,2) and the electrodes (3) consists essentially of non-crystalline carbon (DLC) having electric resistivity ranging from 10 sup 8 to 10 sup 13 OMEGA -cm. The coating layer preferably contains 15-26 atom% of hydrogen. The coating layer preferably has an intensity ratio of 0.7-1.2, the intensity ratio being defined as a ratio of an intensity at 1360cm<-1> to another intensity at 1500cm<-1> when the said coating layer is subjected to Raman spectroscopic analysis. The coating layer is manufactured by the P-CVD process wherein hydrocarbon (CxHy) is introduced into a vacuum container and ionized therein by ionizing process and ionized hydrocarbon is deposited on the surface of the said conductive electrodes by applying thereto a predetermined pulse voltage within an after-glow time of smaller than 250 microseconds. <IMAGE> |
申请公布号 |
DE60126576(T2) |
申请公布日期 |
2007.11.22 |
申请号 |
DE2001626576T |
申请日期 |
2001.12.11 |
申请人 |
GE SPECIALTY MATERIALS JAPAN CO. LTD. |
发明人 |
MASUDA, SHINSUKE;FUJII, KIYOTOSHI |
分类号 |
H01L21/68;H01L21/683 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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