发明名称 FIXED VOLUME VALVE SYSTEM
摘要 Embodiments of the present invention provide valves that provide for uniform holdup volume. An embodiment of the present invention provides a valve comprising a valve body (e.g., one or more pieces) that defines a valve chamber having a valve seat, an inlet flow passage, an outlet flow passage and a diaphragm control flow passage intersecting the valve seat. The valve seat is shaped so that the valve has a fixed holdup volume when at least a threshold vacuum is applied to the diaphragm control flow passage. The valve further comprises a diaphragm movable towards and away from the valve seat. According to one embodiment of the present invention, the valve seat can have a semi-hemispherical shape to which the diaphragm conforms when a minimum vacuum is applied to the diaphragm control flow passage.
申请公布号 WO2007067339(B1) 申请公布日期 2007.11.22
申请号 WO2006US44908 申请日期 2006.11.20
申请人 ENTEGRIS, INC.;GASHGAEE, IRAJ;GONNELLA, GEORGE;CEDRONE, JAMES 发明人 GASHGAEE, IRAJ;GONNELLA, GEORGE;CEDRONE, JAMES
分类号 G01F11/00 主分类号 G01F11/00
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