Embodiments of the present invention provide valves that provide for uniform holdup volume. An embodiment of the present invention provides a valve comprising a valve body (e.g., one or more pieces) that defines a valve chamber having a valve seat, an inlet flow passage, an outlet flow passage and a diaphragm control flow passage intersecting the valve seat. The valve seat is shaped so that the valve has a fixed holdup volume when at least a threshold vacuum is applied to the diaphragm control flow passage. The valve further comprises a diaphragm movable towards and away from the valve seat. According to one embodiment of the present invention, the valve seat can have a semi-hemispherical shape to which the diaphragm conforms when a minimum vacuum is applied to the diaphragm control flow passage.
申请公布号
WO2007067339(B1)
申请公布日期
2007.11.22
申请号
WO2006US44908
申请日期
2006.11.20
申请人
ENTEGRIS, INC.;GASHGAEE, IRAJ;GONNELLA, GEORGE;CEDRONE, JAMES