| 摘要 |
<p>At least one deflector is implemented as a micro-mirror array (5') with individually controlled and -adjustable micro-mirrors (50). Micro-mirror adjustment is such that in addition to the observation beam (17a, 17b), the illumination beam (4a, 4b) is propagated via the micro-mirror array. Adjustment provides at least two different deflection angles, one for the observation beam and the other for the illumination beam. Both beams overlap at least partially.</p> |
