| 摘要 |
PROBLEM TO BE SOLVED: To correct properly positional deviation of a characteristic X-ray image by detecting accurately deviation of an image for correction caused by drift, even when an image has an almost uniform pattern in one direction. SOLUTION: When two SEM images at separated times are acquired, existence of translation symmetry of the images is detected (S1), and in the case where the translation symmetry exists (YES in S2), two-dimensional image matching by a mutual correlation method is performed to the two SEM images, to thereby calculate a positional deviation quantity and the direction (S3), and then one-dimensional image matching restricted to a direction having a small variation is executed, to thereby calculate the positional deviation quantity (S4). A result of the two-dimensional image matching is corrected by using the result, to thereby determine the deviation quantity and the direction (S5), and two-dimensional/one-dimensional matching is repeated until the specified number of times is reached (S6). A laser irradiation position at the two-dimensional scanning time is finely adjusted, based on positional deviation information determined in this way, to thereby correct the deviation of the characteristic X-ray image. COPYRIGHT: (C)2008,JPO&INPIT
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