END EFFECTER

摘要

An end effector is provided to improve a yield by suppressing generation of particles due to an undesired contact in a wafer transferring process. A first supporting member(10) is formed with a shape of plate. A second supporting member(20) is coupled with the first supporting member in order to be moved relatively to the first supporting member along a proximal direction to the first supporting member or a separative direction from the first supporting member. A first grip member(30) is coupled with a lower side of a front end of the first supporting member. A first reception part(31) is formed in the inside of the first grip member in order to receive one edge of a wafer. A second grip member(40) is coupled with a lower side of the second supporting member. A second reception part(41) is formed in the inside of the second grip member in order to receive the other edge of the wafer. One side and the other side of the wafer are gripped by the first and second grip members when the first and second supporting members approach each other.