<p>A method and apparatus for detecting faults. A set of data samples is received, the set of data samples including multiple process variables. One or more multivariate statistical models are adapted, wherein adapting includes applying a change to at least one univariate statistic of the one or more multivariate statistical models if the change is greater than a threshold value. The one or more multivariate statistical models are used to analyze subsequent process data to detect faults.</p>
申请公布号
WO2007130692(A2)
申请公布日期
2007.11.15
申请号
WO2007US11142
申请日期
2007.05.07
申请人
APPLIED MATERIALS, INC.;HARVEY, JERRY, LYNN, JR.;SCHWARM, ALEXANDER, T.