发明名称 ADAPTIVE MULTIVARIATE FAULT DETECTION
摘要 <p>A method and apparatus for detecting faults. A set of data samples is received, the set of data samples including multiple process variables. One or more multivariate statistical models are adapted, wherein adapting includes applying a change to at least one univariate statistic of the one or more multivariate statistical models if the change is greater than a threshold value. The one or more multivariate statistical models are used to analyze subsequent process data to detect faults.</p>
申请公布号 WO2007130692(A2) 申请公布日期 2007.11.15
申请号 WO2007US11142 申请日期 2007.05.07
申请人 APPLIED MATERIALS, INC.;HARVEY, JERRY, LYNN, JR.;SCHWARM, ALEXANDER, T. 发明人 HARVEY, JERRY, LYNN, JR.;SCHWARM, ALEXANDER, T.
分类号 G06F11/30 主分类号 G06F11/30
代理机构 代理人
主权项
地址