INSPECTION APPARATUS OF FPD PATTERN UNDERGOING FIRING USING LIGHT SPECTRUM OF THE PATTERN

摘要

An apparatus for inspecting an FPD pattern undergoing firing using light spectrum of the pattern is provided to control a firing process by quickly deciding whether the firing is excessive or not by comparing specific spectrum strength of the best firing state with the actual strength. An apparatus for inspecting an FPD pattern(112) undergoing firing using light spectrum of the pattern includes a chamber, a spectrometer(150), and a comparing/deciding instrument(140). The chamber includes a board and a heating unit to perform a firing process. The board is placed inside the chamber. The spectrometer measures light spectrum of the FPD pattern formed on the board during the firing process. The comparing/deciding instrument decides that the firing of the FPD pattern is excessive if the strength of the specified spectrum is bigger than a designated standard in a light spectrum measured through the spectrometer.