| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus of a vibrator unit which can measure free edge length, from a stationary plate tip plane of the vibrator unit to a substrate tip plane, with accuracy. SOLUTION: The inspection apparatus of the vibrator unit comprises a base section 38 which makes a positioning pin 39 stand for specifying the location of the vibrator substrate projecting direction of the stationary plate 3 on a placing surface 38' and which lays a vibration unit 5 on the placing surface, in a state where it is positioned by carrying out contact of the stationary plate tip plane to the positioning pin; and a laser-measuring unit 35 which is constituted so that a laser beam is irradiated from the light-emitting unit 36 to the substrate tip plane of the vibration unit, and carry out a light-receiving state or the returning light from the substrate tip plane by a light-receiving unit 37 and which measures the free edge length from the stationary plate tip plane to the substrate tip plane, according to the light-receiving state of the returning light in the light-receiving unit. The laser-measuring unit forms an elliptical spot S by condensing laser light on the substrate tip plane so that the angle of the long axis of the spot is an acute angle with respect to the structural member laminating direction. COPYRIGHT: (C)2008,JPO&INPIT
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