INTEGRATED TEMPERATURE SENSOR

摘要

A biochip has an integrated temperature sensor comprising a micro mechanical actuator (20) having a deformation dependent on temperature, and a detector (30) arranged to output a signal according to a deformation of the actuator. The actuator can be formed of LC material in an elastomeric network. The detector (30) can be optical, magnetic or capacitive. The actuator can be arranged as a layer and the deformation be a curling of the layer.