| 摘要 |
In accordance with this invention, a housing and adaptors to receive a commercial off-the-shelf compact spectrometer was built. The resulting system is particularly adapted for VUV spectrum measurements. Currently portable spectrometer systems have wavelength cutoff at 200 nm or 300 nm, but by adding out invention, we successfully extend this limit to 150 nm. This unit has proven to provide good performance in wavelength region below 200 nm, working under vacuum or purging. In this invention we also performed wavelength and intensity calibration, which makes this instrument ready for immediate industrial manufacture.
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