| 摘要 |
PROBLEM TO BE SOLVED: To obtain a positioning device which can compensate a reactive force against the bend of a cable with high accuracy without depending on a plurality of the cables. SOLUTION: In the positioning device comprising a stage which is position-controlled at its platen upper surface, and the bendable cable connected to the stage at its one end and fixed to a prescribed position at the other end, the positioning device also comprises a force detection means which detects the reactive force caused by the bend of the cable and acting on the stage, an actuator means which imparts a reverse reactive force for canceling the reactive force to the cable, and a force control means which operates the actuator means on the basis of the detection value of the force detection means. COPYRIGHT: (C)2008,JPO&INPIT
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