| 摘要 |
The invention concerns a method for testing electrical elements (10, 11, 13) using at least one electron discharging electrode (22), at least one electron collecting electrode (22) and at least one beam of particles (BI), including ejecting electrons present in the discharge electrode (22) by means of the beam of particles and injecting into an element (10, 11, 13) electrons supplied by the discharge electrode, and ejecting electrons present in an element (10, 11, 13) by means of the beam of particles and collecting with the collecting electrode the electrons ejected from the element. The invention is characterized in that the ejection of the electrons present in the discharge electrode (22) includes applying to the discharge electrode a reflected beam of particles (BR) derived from the reflection on at least one element of an incident beam of particles (BI). The invention provides the advantages of simplifying the step of injecting electrons into an element and of simplifying the structure of the discharge and collection electrodes.
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