DROPLET APPLICATOR, METHOD OF MEASURING GAP IN DROPLET DISCHARGE UNIT, AND METHOD OF ADJUSTING GAP IN DROPLET DISCHARGE UNIT

摘要

PROBLEM TO BE SOLVED: To provide a droplet applicator capable of obtaining a gap between a discharge surface of a droplet discharge unit and a stage regardless of the position of the stage, shortening the exchange time of the droplet discharge unit and also being applied for a fixed stage. SOLUTION: The droplet applicator comprises: a plurality of droplet discharge units 6 movably attached to beam units 41, 42 and for discharging the droplet to a substrate 10 placed on a placing surface 11a; a length measuring unit 14 for measuring the distance between each of reference units provided on a portion near the discharge surface of each droplet discharge unit in the beam units and having a given distance from the placing surface and the discharge surface of each droplet discharge unit and the distance between the reference units; and a calculation unit 15 for calculating the gap between the discharge surface of the droplet discharge unit and the placing surface based on the distance between the discharge surface of the droplet discharge unit and the length measuring unit which is measured by the length measuring unit, the distance between the reference unit and the length measuring unit and the distance between the reference unit and the placing surface which is already given. COPYRIGHT: (C)2008,JPO&INPIT