| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for forming a deposited film onto a cylindrical substrate where the production cost is reduced without sacrificing electric characteristics of an electrophotographic photoreceptor body, and its stable production is possible at high yield. SOLUTION: A plurality of cylindrical substrates 105 are installed at the inside of a reaction vessel 100, and a discharge electrode 101 is provided so as to surround the plurality of cylindrical substrates 105. Partition plates 104 electrically connected with the discharge electrode 101 are arranged between the cylindrical substrates 105, and are also installed in such a manner that the distance between each cylindrical substrate 105 and each partition plate 104 is not made equal spacing in the circumferential direction of each cylindrical substrate 105. COPYRIGHT: (C)2008,JPO&INPIT
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