| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride substrate without irregular color, and an aluminum nitride circuit board and a module using the same. <P>SOLUTION: The aluminum nitride substrate without irregular color is characterized in that difference of oxygen content between the maximum value and the minimum value in the substrate is ≤0.20 mass%, and uses an oxidation-treated aluminum nitride powder as a raw material. The circuit board is formed using the aluminum nitride substrate and the module is formed using the circuit board. <P>COPYRIGHT: (C)2008,JPO&INPIT |
