METHODS AND APPARATUS FOR CONFIGURING PLASMA CLUSTER TOOLS,申请号EP20060720862-传众专利搜索

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发明名称	METHODS AND APPARATUS FOR CONFIGURING PLASMA CLUSTER TOOLS
摘要
申请公布号	EP1854036(A2)	申请公布日期	2007.11.14
申请号	EP20060720862	申请日期	2006.02.16
申请人	LAM RESEARCH CORPORATION	发明人	HUANG, CHUNG-HO;FAN, SHIH-JEUN;CHANG, CHIN-CHUAN
分类号	G06F9/445;G05B19/418	主分类号	G06F9/445
代理机构		代理人
主权项
地址

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