发明名称 Measuring apparatus and exposure apparatus having the same
摘要 A measuring apparatus for measuring optical performance of a test optics by using light includes a first member for generating a first ideal wave front, a second member for generating a second ideal wave front and a test wave front that reflects the optical performance of the test optics, and a detector for detecting an interference fringe between the test wave front and the second ideal wave front that passes the second member, wherein the first member and/or the second member include a first membrane having a first aperture for diffracting the light, and a second membrane having a second aperture for diffracting the light that has passed the first aperture, the second membrane being spaced from the first membrane so that the first and second apertures overlap each other.
申请公布号 US7295327(B2) 申请公布日期 2007.11.13
申请号 US20050112826 申请日期 2005.04.21
申请人 CANON KABUSHIKI KAISHA 发明人 OHKUBO AKINORI
分类号 G01B11/02;G01M11/02;G01B9/02;G03F7/20;H01L21/027 主分类号 G01B11/02
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