| 摘要 |
A contact probe increased in life and accuracy while maintaining ultranarrow pitches. The contact probe (10) comprises a plurality of beam-like cantilevers (2) directly connected to an inspected object when the inspected object is electrically inspected and a piezoelectric element (4) finely vibrating the cantilevers (2). When the piezoelectric element (4) is driven, the tips of the cantilevers (2) are vertically moved to easily break through oxidized film on the electrodes of the inspected object, and securely brought into contact with the electrodes. |
