发明名称 PROCESS TO FORM TFT GATE DIELECTRIC WITH CROSSLINKED POLYMER
摘要 A process for fabricating a thin film transistor including: (a) depositing a gate dielectric precursor composition, wherein the gate dielectric precursor composition includes a polymer comprising polymerized one or more monomers, wherein the one or more monomers includes an optionally substituted vinyl arylalcohol; and (b) irradiating the gate dielectric precursor composition to crosslink the polymer.
申请公布号 US2007259473(A1) 申请公布日期 2007.11.08
申请号 US20060611482 申请日期 2006.12.15
申请人 XEROX CORPORATION 发明人 WU YILIANG;LIU PING;ONG BENG S.
分类号 H01L21/00 主分类号 H01L21/00
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