METHOD FOR PRODUCING FILM-PRODUCING RESIN FOR PHOTORESIST COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a film-producing resin suitable for use in photolithography compositions.

SOLUTION: This method for producing a film-producing resin suitable for use in photolithography compositions comprises passing a solution of the film-producing resin in a solvent through two filter sheets, wherein one of the two filter sheets contains a granular strongly cationic or weakly cationic ion exchange resin; the other contains a granular strongly anionic or weakly anionic ion exchange resin; the filter sheets are rinsed with the solvent used for the preparation of the solution; and the solution of the film-producing resin is passed through the first filter sheet and then the second filter sheet.

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