| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transparent conductive membrane which is of an amorphous membrane and can be patterned comparatively easily by weak acid etching, and which has a low resistance and a high light transmittance, and furthermore, can be easily crystallized, and its manufacturing method. <P>SOLUTION: This is the transparent conductive membrane which is film-formed by using a sputtering target equipped with an oxide sintered body that contains indium oxide, and tin according to need, and which contains barium, and tin according to need, and contains barium. <P>COPYRIGHT: (C)2008,JPO&INPIT |
