发明名称 Lighting system for projection illumination arrangement, has image lens imaging intermediate area plane on emission plane and pupil plane between intermediate area plane and emission plane
摘要 <p>The system (12) has an integrator rod (34) with a light admitting surface and a light emitting surface for homogenization of a light distribution in an intermediate area plane of the system. An image lens (42) images the intermediate area plane on an emission plane (41) and a pupil plane between the intermediate area plane and the emission plane. The light distribution is provided with an allotment structure due to illumination of the integrator rod in an area of the system.</p>
申请公布号 DE102006020321(A1) 申请公布日期 2007.11.08
申请号 DE20061020321 申请日期 2006.05.03
申请人 CARL ZEISS SMT AG 发明人 RAIM, MICHAEL;FIOLKA, DAMIAN
分类号 G03F7/20 主分类号 G03F7/20
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