| 摘要 |
PROBLEM TO BE SOLVED: To achieve a contact head that is reduced in cost and mass, and is easily assembled. SOLUTION: A plunger presses a device pusher at a predetermined time in the contact head. The contact head comprises: a recess provided on one face of a base plate; a cover plate having one face contacting one face of the base plate, and composing a pressurization chamber along with the recess; a plunger hole provided in the cover plate to communicate with the pressurization chamber; a diaphragm provided in a portion of the plunger hole communicated with the pressurization chamber; and the plunger provided in the plunger hole, attached to the diaphragm at one end, and pressing the device pusher at the other end due to a pressure to the pressurization chamber. COPYRIGHT: (C)2008,JPO&INPIT
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