CORROSION-RESISTANT MEMBER, ITS MANUFACTURING METHOD AND SEMICONDUCTOR/LIQUID CRYSTAL MANUFACTURING APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a solution for the problem in a member which is used in an apparatus for manufacturing a semiconductor or a liquid crystal and is thus required to have higher corrosion resistance, that the member has insufficient corrosion resistance against a corrosive halogen gas or plasma thereof used in the apparatus for manufacturing the semiconductor or the liquid crystal and thus cannot be used over a long period of time. SOLUTION: The corrosive member comprises a substrate made of ceramic or metal and a corrosion-resistant film formed on at least a part of the surface of the substrate. The corrosion-resistant film essentially comprises Y2O3, provided that the composition ratio of the Y component is larger than 40 mol% and equal to or smaller than 80 mol%. COPYRIGHT: (C)2008,JPO&INPIT