| 摘要 |
It is an object to provide a parameter extraction method using a model equation having a physical meaning, in which parameters optimum for an element are extracted without setting appropriate initial values based on experience or deep understanding of models and actual device characteristics. A structure is provided in which multiple patterns of initial values of parameters are generated by a random number generator mechanism, and automatic parameter extraction is executed for each initial value to select a combination of parameters in which ultimate difference between a calculated value and a measured value is minimized thereby finding an optimal solution.
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