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发明名称
IMPROVING DEVICE PERFORMANCE BY EMPLOYING AN IMPROVED METHOD FOR FORMING HALO IMPLANTS
摘要
申请公布号
KR100774761(B1)
申请公布日期
2007.11.08
申请号
KR20017015654
申请日期
2001.12.05
申请人
发明人
分类号
H01L21/336
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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