APPARATUS FOR MANUFACTURING IMPRINT PAD

摘要

An apparatus for separating and bonding a mold for forming fine patterns of a substrate is provided to reduce deformation of a mold through separation between a jig for a mold and the mold by uniform force to prevent lowering of the quality. A lower vacuum part(5) is arranged on a base(1) for forming a vacuum pressure. A moving plate(7) is arranged above the lower vacuum part, movable to the lower vacuum part. A transferring unit(9) transfers the moving plate in up and down directions. An upper vacuum part(17) is combined with the moving plate and is arranged in parallel with the lower vacuum part. A lower holder(11) is combined with the moving plate to insert a jig(15) for a mold in parallel with the lower vacuum part.