摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the occurrence of interference fringes in a pattern projector and a pattern inspection device using laser light. <P>SOLUTION: The pattern projector and the pattern inspection device include a laser generator for generating the laser light, a mask having a pattern, an optical system provided between the laser generator and the mask for irradiating the laser light onto the mask and projecting the pattern onto an object, a rotational phase plate provided in the optical system, a driver for rotating the phase plate, and a shock-absorbing medium for preventing vibration from propagating between the phase plate and the optical system. <P>COPYRIGHT: (C)2008,JPO&INPIT |