| 摘要 |
PROBLEM TO BE SOLVED: To easily and compactly perform the attachment of an operating portion to a housing without lowering strength in a valve having a housing formed by squeezing a metallic material. SOLUTION: In the vacuum valve composed of a main valve 1 that opens and closes a vale seat 4 in a flow path connecting two ports P1 and P2 by a valve member 5, and an operating portion 2 that performs an opening and closing operation for the valve member 5, the housing 3 of the main valve 1 is assembled by joining two port members 7 and 8 with a cylindrically shaped housing body 6 formed by squeezing the metallic material. At the end of the housing 3, a flange-shaped attaching portion 10 that is bent inward is formed. The operating portion 2 is attached to the attaching portion 10 via a ring-shaped supporting seat member 21. A sealing member 33 is sandwiched between a ring-shaped supporting plate 25 and the attaching portion 10. Both ends of a bellows 23 are connected to the supporting plate 25 and the valve member 5, respectively. COPYRIGHT: (C)2008,JPO&INPIT |
