| 摘要 |
A PCM(Process Change Monitor) test pattern for checking the continuity of a metalization is provided to use effectively an area of a scribe lane by connecting patterns of different lengths every metal layer in parallel. A first probe pad(10) and a second probe pad(20) are formed on both ends of a metalization. A first metal M pad(30) is electrically connected to the first probe pad, and a second metal M pad(40) is electrically connected to the second probe pad. A metal M test pattern(50) has one end connected to the first metal M pad and the other end connected to the second metal M pad. A first metal N pad(60) is electrically connected to the first probe pad, and a second metal N pad(60) is electrically connected to the second probe pad. A metal N test pattern(70) has one end connected to the first metal N pad and the other end connected to the second metal N pad.
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