| 摘要 |
PROBLEM TO BE SOLVED: To provide a designated position identification method to identify the designated position in an array structure in which a reference pattern is repeatedly arranged by a reference pattern counting. SOLUTION: In an array structure image, a pattern detection forecast region produced by the position of a start point, an address of the start point, and a unit vector, and the pattern detection positions obtained by pattern matching with reference pattern images are compared and pattern counting is carried out making a judgement such as correct judgement, judgement failure, and wrong detection. By using an image shift deflector and shifting the visual field, the array structure images are photographed one by one, and the terminal point specified by the address is identified. When it does not reach the terminal point only by the image shift detector, the range of visual field movement of the image shift detector is moved on the test piece stage, and visual field movement by the image shift is continued. COPYRIGHT: (C)2008,JPO&INPIT
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