发明名称 VACUUM GATE VALVE
摘要 PROBLEM TO BE SOLVED: To solve problems in two conventional methods for contraction of an inflate seal for releasing sealing of a valve, or low valve releasing speed of one method depending on the restoration force of the inflate seal, and necessity of preparation of a separate exhaust facility or an increased number of part items and low reliability of the other method of evacuating the inflate seal. SOLUTION: A hollow seal member expansible and contractible by introduction and discharge of a high-pressure fluid is provided on a valve element set in the clearance of a valve body or in the inside of a face of the valve body opposed to the valve element. The valve element or the face opposed to the valve element of the valve body is two-dimensionally changed in thickness by expansion and contraction of the seal member. In valve closing operation, the seal member stuck to the surface of the valve element or the face opposed to the valve element seals the space between both faces of a sealed part around a valve opening part in the clearance of the valve body and the valve element. In valve opening operation, the hollow seal member is rapidly exhausted by a discharge acceleration means. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007292273(A) 申请公布日期 2007.11.08
申请号 JP20060123727 申请日期 2006.04.27
申请人 ULVAC JAPAN LTD;ULVAC SEIKI KK 发明人 KASHIWAGI TOSHIHIRO;UZAWA NOBORU;SAKUMA MORIHIRO
分类号 F16K3/10;F16K51/02 主分类号 F16K3/10
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