| 摘要 |
A diaphragm pump comprising a pressure chamber arranged such that the volume of the pressure chamber is expanded and contracted by oscillation of a diaphragm ( 5 ), a suction-side check valve ( 7 ) for sucking air into the pressure chamber and a discharge-side check valve ( 8 ) for discharging air from the pressure chamber. The suction-side check valve is arranged to close by a valve body ( 17 ) being elastically deformed and brought into close contact with a valve seat, and open by the valve body elastically returning to the normal shape and coming out of contact with the valve seat. The discharge-side check valve is arranged to open by a valve body ( 18 ) being elastically deformed and producing a space relative to a valve seat, and close by the valve body elastically returning to the normal shape and coming into close contact with the valve seat.
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