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经营范围
发明名称
MICROWAVE PLASMA PROCESSING METHOD
摘要
申请公布号
EP1614770(A4)
申请公布日期
2007.11.07
申请号
EP20040726897
申请日期
2004.04.12
申请人
TOYO SEIKAN KAISHA, LTD.
发明人
KURASHIMA, HIDEO;KOBAYASHI, AKIRA;YAMADA, KOUJI;NAMIKI, TSUNEHISA
分类号
C23C16/04;C23C16/511;H01J37/32;H05B6/80
主分类号
C23C16/04
代理机构
代理人
主权项
地址
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