发明名称 Photoresist composition, method for forming film pattern using the same, and method for manufacturing thin film transistor array panel using the same
摘要 A photoresist composition, a method for forming a film pattern using the photoresist composition, and a method for manufacturing a thin film transistor array panel using the photoresist composition are provided. In one embodiment, a photoresist composition includes an alkali-soluble resin, a photosensitive compound, and an additive, for advantageously providing a uniform photoresist in a channel region.
申请公布号 US7291439(B2) 申请公布日期 2007.11.06
申请号 US20060483794 申请日期 2006.07.07
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK JEONG-MIN;LEE HI-KUK;JU JIN-HO;JEON WOO-SEOK;JUNG DOO-HEE;KIM DONG-MIN;CHOI KI-SIK
分类号 G03F7/004 主分类号 G03F7/004
代理机构 代理人
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