| 摘要 |
A vacuum pump having a fluid nozzle and an exhaust system are provided to prevent by-product or surplus gas from being cohered to a partition by forming a fluid film of an inert gas or washing liquid on a sidewall of the lobe or the partition. A stator has cylinder walls(121 to 125) and a pair of partitions(111 to 116) disposed on both ends of the cylinder walls. Rotary shafts(131,132) penetrate the partitions, and lobes(141 to 145) are attached to the rotary shafts in the stator and having a fluid nozzle(149). The fluid nozzle is disposed on sidewalls of the robe opposite to the partitions. The rotary shaft has fluid supply passages(133,134) communicating with the fluid nozzle and is connected to a fluid feeder.
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