SURFACE-COATED POLISH CARRIER AND METHOD FOR COATING THEREOF

摘要

A surface-coated polish carrier and a method for coating the same are provided to improve durability of the polish carrier by coating a carbon film containing reactive gas or metal onto the polish carrier. In a method of coating a polish carrier, the polish carrier is placed in a chamber, and then gas remaining in the chamber is exhausted so that the chamber maintains a vacuum state(S100). An oxide layer or a pollutant formed on the surface of the polish carrier is removed or cleaned(S110). A buffer layer is coated on the surface of the polish carrier while gas is being injected into the chamber and the pressure in the chamber is maintained to a constant level(S120). A carbon film is coated on the surface of the polish carrier while gas is being injected into the chamber and the pressure in the chamber is maintained to a constant level(S130).